(Aluminum Foil Samples)


What Is It?

Scanning Auger Microscopy (also known as Auger Electron Spectroscopy) allows for the analysis of the elemental composition of surfaces and interfaces at a highly detailed level.

Why Should I Use It?

This technique typically analyzes at a depth of 2 -3 nm, and with our high-accuracy instrumentation (field emission source) we have the ability to sample with a lateral resolution of better than 30 nm. This allows for the inspection of films with the thickness of only a few monolayers from top down, or layers a few tens of nanometers thick when examined in cross section.

What Do I Get Out of It?

Auger analysis can detect all elements except hydrogen and helium, at concentrations as low as 0.1 atomic percent (depending on element and matrix).

Applications Include:


Materials Evaluation

  • Verification of surface homogeneity
  • Catalyst degradation
  • Interface analysis
  • Diffusion studies
  • Identification of surface contaminants

Failure Analysis

  • Corrosion analysis
  • Stain identification
  • Lifted lead bond evaluation
  • Bond pad contamination
  • Material delamination analysis
  • Metal embrittlement evaluation

Quality Control

  • Comparison of good to bad samples
  • Verification of surface process modification
  • Relative thickness on thin film.


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