Energy Dispersive X-Ray Spectroscopy

Energy Dispersive X-Ray Spectroscopy (EDS) is an analytical technique to qualitatively and quantitatively identify the elemental composition of materials analyzed in an SEM. EDS analyzes the top few microns of the sample with a spatial resolution as small as one micron.

Modern, ultra-thin polymer windowed EDS can detect elements with atomic numbers greater than boron, with limits of detection as low as 0.1 weight percent (depending on material).

Individual spectra can be collected from spots or areas, or EDS data can be collected as either element maps or line profiles with a spatial resolution of one micron.